圖像測量儀是由機(jī)械主機(jī)、位移傳感器、圖像檢測系統(tǒng)、控制部分和測量軟件等組成的測量儀器，可以測量各種復(fù)雜形狀零件的表面坐標(biāo)點(diǎn)。 驗(yàn)收時(shí)，下列計(jì)量特性的校準(zhǔn)結(jié)果不得超過合同或制造廠規(guī)定的技術(shù)要求。

  1. 術(shù)語

  1.焦平面尺寸測量的示值誤差（Exy）

  平行于焦平面方向的尺寸測量指示誤差。

  筆記：

  1）本規(guī)范中XY平面默認(rèn)與焦平面平行，如果不平行，則必須做相應(yīng)的標(biāo)記（如Exz或Eyz）

  2）如果只在平行于X軸的方向或只在平行于Y軸的方向上得到示值誤差，可以用Ex或Ey表示。

  2、光軸方向的尺寸測量指示誤差（Ez）

  平行于圖像檢測系統(tǒng)光軸方向的尺寸測量指示誤差。

  注意：在本規(guī)范中，Z 軸默認(rèn)平行于成像系統(tǒng)的光軸。 如果不是，則必須進(jìn)行相應(yīng)的標(biāo)記（如 Ex 或 Ey）

  3、圖像檢測系統(tǒng)的尺寸測量指示誤差（Ev）

  在圖像測量儀的移動平臺和圖像檢測系統(tǒng)不移動的情況下，圖像檢測系統(tǒng)的視場內(nèi)的尺寸測量指示誤差。

  4.各截面測量結(jié)果的一致性（Es）

  影像測量儀在沿光軸對不同截面進(jìn)行測量時(shí)，各截面坐標(biāo)原點(diǎn)在XY平面上投影的一致性程度。

  5. 二維檢測誤差（P2D）

  使用圖像測量儀測量平面圓形物理標(biāo)準(zhǔn)的半徑變化范圍。

  6.圖像探針檢測誤差（Py）

  用影像測量儀測量影像檢測系統(tǒng)視場內(nèi)平面圓形物體標(biāo)準(zhǔn)的半徑變化范圍。

  7、變焦檢測誤差（Pz）

  變倍圖像檢測系統(tǒng)的圖像測量儀用于測量同一個(gè)圓形目標(biāo)，以及不同倍率下目標(biāo)圓心坐標(biāo)指示值的范圍。

  2、校準(zhǔn)項(xiàng)目

  1、尺寸測量示值誤差

  對于具有沿光軸測量功能的圖像測量儀器，應(yīng)校準(zhǔn)以下尺寸測量指示誤差：Exy、Ez、Ev。

  筆記：

  1) Ev僅適用于圖像檢測系統(tǒng)視場內(nèi)具有測量功能的圖像測量儀器。

  2) 工作臺不可移動的影像測量儀器，只需校準(zhǔn)Ev。

  對于具有沿光軸定位功能的影像測量儀和只能在任意二維平面上進(jìn)行測量的影像測量儀，應(yīng)標(biāo)定以下尺寸測量示值誤差：Exy、Ev；

  筆記：

  1) Ev 僅適用于可以在圖像檢測系統(tǒng)的視場內(nèi)進(jìn)行測量的圖像測量儀器。

  2) 工作臺不可移動的影像測量儀器，只需校準(zhǔn)Ev。

  2.各截面測量結(jié)果的一致性（Es）

  3.檢測錯(cuò)誤

  3.1。 二維檢測誤差 (P2D)

  注：工作臺不能移動的影像測量儀無此要求。

  3.2. 圖像探針檢測誤差 (Py)

  4、變焦檢測誤差（Pz）

  三、注意事項(xiàng)

  校準(zhǔn)時(shí)，應(yīng)嚴(yán)格按照制造商提供的儀器使用說明書進(jìn)行操作。 應(yīng)特別注意以下幾個(gè)方面：

  a) 儀器啟動/預(yù)熱程序；

  b) 測量系統(tǒng)的校準(zhǔn)；

  c) 成像系統(tǒng)的放大倍數(shù)；

  d) 照明條件。

Image measuring instrument is a measuring instrument composed of mechanical host, displacement sensor, image detection system, control part and measurement software, which can measure the coordinate points on the surface of various complex shapes of parts.  At the time of acceptance, the calibration results of the following measurement characteristics shall not exceed the technical requirements specified by the contract or the manufacturer.  

A term,  

1. Focusing plane size measurement error (Exy)  

Error of size measurement in the direction parallel to the focusing plane.  

Note:  

1) In this specification, the XY plane is parallel to the focusing plane by default, otherwise it should be labeled accordingly (e.g. Exz or Eyz)  

2) If the indication error obtained only along the direction parallel to the X axis or the Y axis, it can be expressed as Ex or Ey.  

2. Error of optical axis dimension measurement (Ez)  

Error of size measurement in the direction parallel to the optical axis of the image detection system.  

Note: In this specification, the z-axis is by default parallel to the optical axis of the imaging system, otherwise it should be marked accordingly (e.g. Ex or Ey)  

3. Size measurement error of image detection system (Ev)  

In the case that the moving platform of the image measuring instrument and the image detection system do not move, the size measurement error in the field of view of the image detection system.  

4. Measurement results of each section -- Compliance (Es)  

The consistency of the coordinates of the origin of each section projected onto the XY plane when the image measuring instrument is measuring on different sections along the optical axis.  

5. Two-dimensional detection error (P2D)  

The radius variation range of the plane circular standard was measured with an image measuring instrument.  

6. Image probe detection error (Py)  

The radius variation range of the plane circular physical standard in the field of view of the image detection system was measured with an image measuring instrument.  

7. Multiplication detection error (Pz)  

The image measuring instrument of the magnification image detection system is used to measure the range of the target center coordinates under different magnification.  

Ii. Calibration items  

1. Error of size measurement  

For the image measuring instrument with measuring function along the optical axis, the following size measurement error should be calibrated: Exy, Ez, Ev.  

Note:  

1) Ev is only applicable to the image measuring instrument with measurement function within the field of view of the image detection system.  

2) For an image measuring instrument with an immovable table, just calibrate the Ev.  

For the image measuring instrument with positioning function along the optical axis and the image measuring instrument which can only make measurement in any two-dimensional plane, the following size measurement error should be calibrated: Exy, Ev;  

Note:  

1) Ev is only applicable to the image measuring instrument that can measure within the field of view of the image detection system.  

2) For an image measuring instrument with an immovable table, just calibrate the Ev.  

2. Consistency of measurement results of each section (Es)  

3. Detection error  

3.1 Two-dimensional detection error (P2D)  

Note: There is no requirement for image measuring instrument with immovable table.  

3.2 Image Probe detection error (Py)  

4. Multiplication detection error (Pz)  

Three, notes  

When performing calibration, strictly follow the instrument instructions provided by the manufacturer. Special attention should be paid to:  

A) Instrument startup/warm-up procedure;  

B) Calibration of measurement system;  

C) Magnification of image system;  

D) Lighting conditions.